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US-9220638-B2 · Dec 29, 2015 · US
US8985994B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8985994-B2 |
| Application number | US-96011210-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 3, 2010 |
| Priority date | Dec 11, 2009 |
| Publication date | Mar 24, 2015 |
| Grant date | Mar 24, 2015 |
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A patterning apparatus includes a stage arranged under a flexible substrate, a plurality of correction units arranged closely to the stage, attached to the flexible substrate, and configured to apply a tension force to the flexible substrate, and a pattern forming unit configured to form a pattern on the flexible substrate. The patterning apparatus corrects distortion of the flexible substrate by using the correction units.
Opening claim text (preview).
What is claimed is: 1. A patterning apparatus comprising: a stage disposed under a flexible substrate and having a plurality of first vacuum holes on a flat upper surface thereof; a plurality of correction units being adjacent to the stage, being attached to the flexible substrate, and applying a tension force to the flexible substrate; a pattern forming unit forming a pattern on the flexible substrate; a first roller winding the flexible substrate; a second roller releasi…
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