Perpendicular MTJ stacks with magnetic anisotropy enhancing layer and crystallization barrier layer

US8980650B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8980650-B2
Application numberUS-201414454682-A
CountryUS
Kind codeB2
Filing dateAug 7, 2014
Priority dateSep 26, 2012
Publication dateMar 17, 2015
Grant dateMar 17, 2015

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Abstract

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Magnetic tunnel junctions (MTJ) suitable for spin transfer torque memory (STTM) devices, include perpendicular magnetic layers and one or more anisotropy enhancing layer(s) separated from a free magnetic layer by a crystallization barrier layer. In embodiments, an anisotropy enhancing layer improves perpendicular orientation of the free magnetic layer while the crystallization barrier improves tunnel magnetoresistance (TMR) ratio with better alignment of crystalline texture of the free magnetic layer with that of a tunneling layer.

First claim

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What is claimed is: 1. A method of forming a perpendicular magnetic tunneling junction (MTJ), comprising: depositing a dielectric tunneling layer with (001) crystal texture; depositing an amorphous CoFeB free magnetic layer over the tunneling layer; depositing a crystallization barrier layer over the amorphous CoFeB free magnetic layer; depositing a magnetic anisotropy enhancing layer having (111) crystal texture over the crystallization barrier layer, and annealing the di…

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What does patent US8980650B2 cover?
Magnetic tunnel junctions (MTJ) suitable for spin transfer torque memory (STTM) devices, include perpendicular magnetic layers and one or more anisotropy enhancing layer(s) separated from a free magnetic layer by a crystallization barrier layer. In embodiments, an anisotropy enhancing layer improves perpendicular orientation of the free magnetic layer while the crystallization barrier improves …
Who is the assignee on this patent?
Oguz Kaan, Doczy Mark L, Doyle Brian, and 5 more
What technology area does this patent fall under?
Primary CPC classification H10N50/80. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Mar 17 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).