Magnetic-tunnel-junction devices for a magnetic-field sensor
US-2024389467-A1 · Nov 21, 2024 · US
US8980650B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8980650-B2 |
| Application number | US-201414454682-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 7, 2014 |
| Priority date | Sep 26, 2012 |
| Publication date | Mar 17, 2015 |
| Grant date | Mar 17, 2015 |
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Magnetic tunnel junctions (MTJ) suitable for spin transfer torque memory (STTM) devices, include perpendicular magnetic layers and one or more anisotropy enhancing layer(s) separated from a free magnetic layer by a crystallization barrier layer. In embodiments, an anisotropy enhancing layer improves perpendicular orientation of the free magnetic layer while the crystallization barrier improves tunnel magnetoresistance (TMR) ratio with better alignment of crystalline texture of the free magnetic layer with that of a tunneling layer.
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What is claimed is: 1. A method of forming a perpendicular magnetic tunneling junction (MTJ), comprising: depositing a dielectric tunneling layer with (001) crystal texture; depositing an amorphous CoFeB free magnetic layer over the tunneling layer; depositing a crystallization barrier layer over the amorphous CoFeB free magnetic layer; depositing a magnetic anisotropy enhancing layer having (111) crystal texture over the crystallization barrier layer, and annealing the di…
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