Density multiplication and improved lithography by directed block copolymer assembly
US-9183870-B2 · Nov 10, 2015 · US
US8980451B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8980451-B2 |
| Application number | US-201113185880-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 19, 2011 |
| Priority date | Sep 17, 2010 |
| Publication date | Mar 17, 2015 |
| Grant date | Mar 17, 2015 |
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According to one embodiment, in a method of manufacturing a magnetic recording medium which is configured such that a ferromagnetic recording part is formed on a substrate in a desired track pattern or a desired bit pattern, a ferromagnetic film is formed on the substrate, and then a mask is formed on the ferromagnetic film, the mask having an opening above a region for isolating the ferromagnetic film between tracks or bits. Subsequently, a B-based gas is radiated on the region of the ferromagnetic film through the opening of the mask, thereby increasing a B content of the region to nonmagnetize the region.
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What is claimed is: 1. A magnetic recording medium comprising: a ferromagnetic recording part formed on a discoidal substrate, the ferromagnetic recording part comprising a ferromagnetic film, a track pattern having a pattern formed of a plurality of tracks or a bit pattern having a pattern formed of a plurality of bits being formed on the ferromagnetic film, and a ferromagnetism-deactivated part formed in a region for isolating the ferromagnetic recording part between the track…
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