Mask and manufacturing method therefor
US-2015259779-A1 · Sep 17, 2015 · US
US8980409B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8980409-B2 |
| Application number | US-201214111330-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 12, 2012 |
| Priority date | Apr 15, 2011 |
| Publication date | Mar 17, 2015 |
| Grant date | Mar 17, 2015 |
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The invention provides a laminate of a substrate, a polyimide film, and a coupling treatment layer interposed therebetween, which provides different delamination strengths between the substrate and the polyimide film to form a prescribed pattern. The invention also provides a method for producing such a laminate formed from at least a substrate and a polyimide film, whereby, using a film obtained by plasma treatment of at least the surface facing the substrate as the polyimide film, coupling agent treatment is performed on at least one of the surfaces facing the substrate and the polyimide film to form a coupling treatment layer, deactivation treatment is performed on a portion of the coupling treatment layer to form a pre-determined pattern, and then pressing and heating are performed with the substrate and polyimide film overlapping.
Opening claim text (preview).
The invention claimed is: 1. A laminate comprising a substrate, a polyimide film, and a coupling treatment layer interposed therebetween, wherein delamination strength between the substrate and the polyimide film is different between good adhesion parts and easily peeling parts, forming a prescribed pattern. 2. The laminate according to claim 1 , wherein 180-degree peel strength between the substrate and the polyimide film in the easily peeling part is ½ or low…
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