Substrate processing apparatus
US-2015375273-A1 · Dec 31, 2015 · US
US8979977B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8979977-B2 |
| Application number | US-201113810595-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 20, 2011 |
| Priority date | Jul 30, 2010 |
| Publication date | Mar 17, 2015 |
| Grant date | Mar 17, 2015 |
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A device for degassing aqueous media has a first container containing medium to be degassed. A first line connects the first container to a degassing module and a second line connects the degassing module to a second container for receiving the degassed medium. A first non-return valve in the first line prevents backflow from the degassing module to the first container. A hydrophilic membrane in the second line prevents the passage of gas, and a branch between the degassing module and the hydrophilic membrane has a hydrophobic degassing filter for letting out gas. A third line is connected to the first line between the first container and the first non-return valve and to the second line between the second container and the hydrophilic membrane. A second non-return valve in the third line between the first non-return valve and the hydrophilic membrane prevents a flow towards the second container.
Opening claim text (preview).
The invention claimed is: 1. A device ( 1 ) for degassing aqueous media, comprising: a first container ( 2 ) containing the medium to be degassed, a degassing module ( 4 ) connected via a first line ( 9 ) to the first container ( 2 ), a second container ( 7 ) for receiving the degassed medium connected via a second line ( 10 ) to the degassing module ( 4 ), a first non-return valve ( 3 ) in the first line ( 9 ) for preventing backflow from the degassing module ( 4 ) to the fir…
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