Piezoelectric inkjet die stack
US-9221247-B2 · Dec 29, 2015 · US
US8979249B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8979249-B2 |
| Application number | US-201214112825-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 30, 2012 |
| Priority date | Apr 18, 2011 |
| Publication date | Mar 17, 2015 |
| Grant date | Mar 17, 2015 |
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Official abstract text for this publication.
In a piezoelectric actuator ( 1 ) that vibrates a diaphragm ( 12 ) provided on a pressure chamber ( 21 ) formed in a substrate ( 11 ) toward the pressure chamber ( 21 ), a lower electrode ( 13 ), a piezoelectric member ( 14 ) and an upper electrode ( 15 ) sequentially stacked on the diaphragm ( 12 ) are provided, on a part of the piezoelectric member ( 14 ) above the side wall of the pressure chamber ( 21 ), an upper electrode drawing portion ( 15 a ) drawn out from the upper electrode ( 15 ) above the pressure chamber ( 21 ) is formed and under the upper electrode drawing portion ( 15 a ), the piezoelectric member ( 14 ) is separated by a gap portion (S) above a boundary surface between the side wall ( 21 a ) of the pressure chamber ( 21 ) and the pressure chamber ( 21 ) in the substrate ( 11 ).
Opening claim text (preview).
The invention claimed is: 1. A piezoelectric actuator that deforms a diaphragm provided on a pressure chamber formed in a substrate toward the pressure chamber, wherein, in a state where the diaphragm is located on the pressure chamber, a lower electrode, a piezoelectric member and an upper electrode are sequentially stacked on the diaphragm, on a part of the piezoelectric member above a side wall of the pressure chamber, an upper electrode drawing portion drawn out from the up…
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