Micro-electro-mechanical device with compensation of errors due to disturbance forces, such as quadrature components
US-2015377624-A1 · Dec 31, 2015 · US
Gyro sensor, electronic apparatus, and method of manufacturing gyro sensor
US8978472B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8978472-B2 |
| Application number | US-201213659475-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 24, 2012 |
| Priority date | Nov 4, 2011 |
| Publication date | Mar 17, 2015 |
| Grant date | Mar 17, 2015 |
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Abstract
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A gyro sensor according to the invention includes a driving portion that includes a driving support portion connected to a driving spring portion and a detecting portion that includes a detecting support portion connected to the driving support portion with the detecting spring portion interposed. The driving support portion is configured to vibrate in a first axis (X-axis) direction, and the detecting support portion is configured to be displaced in a second axis (Y-axis) direction orthogonal to the first axis (x-axis). When the resonant frequency of the driving portion is f 1 , the resonant frequency of the detecting portion is f 2 , the width of the driving spring portion is w 1 , and the width of the detecting spring portion is w 2 , Expression (1) below is satisfied. 0.87( f 2 /f 1 )≦( w 2 /w 1 )≦1.13( f 2 /f 1 ) (1) (where, w 1 ≠w 2 and f 1 ≠f 2 ).
First claim
Opening claim text (preview).
What is claimed is: 1. A gyro sensor comprising: a driving portion that includes a driving support portion connected to a driving spring portion; and a detecting support portion that is connected to the driving support portion with a detecting spring portion interposed, wherein the driving support portion is configured to vibrate in a first axis direction, and the detecting support portion is configured to be displaced in a second axis direction orthogonal to the first axis di…
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- G01C19/5747Primary
Physics · mapped topic
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Frequently asked questions
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- What does patent US8978472B2 cover?
- A gyro sensor according to the invention includes a driving portion that includes a driving support portion connected to a driving spring portion and a detecting portion that includes a detecting support portion connected to the driving support portion with the detecting spring portion interposed. The driving support portion is configured to vibrate in a first axis (X-axis) direction, and the d…
- Who is the assignee on this patent?
- Seiko Epson Corp
- What technology area does this patent fall under?
- Primary CPC classification G01C19/5747. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 17 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).