Semiconductor devices having a seal ring
US-2024413245-A1 · Dec 12, 2024 · US
US8977988B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8977988-B2 |
| Application number | US-201313859718-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 9, 2013 |
| Priority date | Apr 9, 2013 |
| Publication date | Mar 10, 2015 |
| Grant date | Mar 10, 2015 |
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A method of optical proximity correction executed by a computer system and integrated circuit layout formed by the same, the step of optical proximity correction comprises: providing an integrated circuit layout with a plurality of parallel line patterns, wherein one side of at least one line pattern is provided with a convex portion; and modifying the integrated circuit layout by forming a concave portion corresponding to the convex portion at the other side of the line pattern.
Opening claim text (preview).
What is claimed is: 1. A method of optical proximity correction executed by a computer system, comprising the steps of: providing an integrated circuit layout with a plurality of parallel line patterns and a plurality of interconnect patterns disposed corresponding to said parallel line patterns, wherein one side of each one of said parallel line patterns has a convex portion so that said convex portion overlaps a corresponding one of said interconnect patterns; and using the co…
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