Method of optical proximity correction for modifying line patterns and integrated circuits with line patterns modified by the same

US8977988B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8977988-B2
Application numberUS-201313859718-A
CountryUS
Kind codeB2
Filing dateApr 9, 2013
Priority dateApr 9, 2013
Publication dateMar 10, 2015
Grant dateMar 10, 2015

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Abstract

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A method of optical proximity correction executed by a computer system and integrated circuit layout formed by the same, the step of optical proximity correction comprises: providing an integrated circuit layout with a plurality of parallel line patterns, wherein one side of at least one line pattern is provided with a convex portion; and modifying the integrated circuit layout by forming a concave portion corresponding to the convex portion at the other side of the line pattern.

First claim

Opening claim text (preview).

What is claimed is: 1. A method of optical proximity correction executed by a computer system, comprising the steps of: providing an integrated circuit layout with a plurality of parallel line patterns and a plurality of interconnect patterns disposed corresponding to said parallel line patterns, wherein one side of each one of said parallel line patterns has a convex portion so that said convex portion overlaps a corresponding one of said interconnect patterns; and using the co…

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What does patent US8977988B2 cover?
A method of optical proximity correction executed by a computer system and integrated circuit layout formed by the same, the step of optical proximity correction comprises: providing an integrated circuit layout with a plurality of parallel line patterns, wherein one side of at least one line pattern is provided with a convex portion; and modifying the integrated circuit layout by forming a con…
Who is the assignee on this patent?
United Microelectronics Corp
What technology area does this patent fall under?
Primary CPC classification H10W20/43. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Mar 10 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).