Acoustic wave device and module
US-2024088866-A1 · Mar 14, 2024 · US
US8975802B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8975802-B2 |
| Application number | US-201213565161-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 2, 2012 |
| Priority date | Aug 31, 2011 |
| Publication date | Mar 10, 2015 |
| Grant date | Mar 10, 2015 |
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An acoustic wave device includes: a comb-like electrode provided on a piezoelectric substrate; and a first medium that covers the comb-like electrode and has at least a silicon oxide film in which an element is doped, wherein sonic speed in the silicon oxide film in which the element is doped is lower than sonic speed in an undoped silicon oxide film.
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What is claimed is: 1. An acoustic wave device comprising: a comb-like electrode provided on a piezoelectric substrate; and a first medium that covers the comb-like electrode and has at least a silicon oxide film in which an element is doped, wherein sonic speed in the silicon oxide film in which the element is doped is lower than sonic speed in an undoped silicon oxide film. 2. The acoustic wave device as claimed in claim 1 , wherein the first medium in…
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