Semiconductor device, semiconductor substrate, method for manufacturing device, and method for manufacturing semiconductor substrate

US8975728B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8975728-B2
Application numberUS-201213612562-A
CountryUS
Kind codeB2
Filing dateSep 12, 2012
Priority dateOct 18, 2011
Publication dateMar 10, 2015
Grant dateMar 10, 2015

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

A second epitaxial layer is grown epitaxially over a first epitaxial layer. The first epitaxial layer includes an epitaxially grown layer and a defect layer. The defect layer is disposed over the epitaxially grown layer and serves as a surface layer of the first epitaxial layer. The defect density of the defect layer is 5×10 17 cm −2 or more. Defects penetrating through the defect layer form loops in the second epitaxial layer.

First claim

Opening claim text (preview).

What is claimed is: 1. A semiconductor device comprising: a first epitaxial layer; a second epitaxial layer formed over the first epitaxial layer; and an element formed using the second epitaxial layer, wherein the first epitaxial layer includes: an epitaxially grown layer; and a defect layer that is disposed over the epitaxially grown layer, serves as a surface layer of the first epitaxial layer, and has a defect density of 5×10 17 cm −2 or more, and wherein disloc…

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What does patent US8975728B2 cover?
A second epitaxial layer is grown epitaxially over a first epitaxial layer. The first epitaxial layer includes an epitaxially grown layer and a defect layer. The defect layer is disposed over the epitaxially grown layer and serves as a surface layer of the first epitaxial layer. The defect density of the defect layer is 5×10 17 cm −2 or more. Defects penetrating through the defect layer form …
Who is the assignee on this patent?
Ikarashi Nobuyuki, Tanaka Masayasu, Renesas Electronics Corp
What technology area does this patent fall under?
Primary CPC classification H10P14/3216. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Mar 10 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).