Method of manufacturing a capacitor
US-2019123135-A1 · Apr 25, 2019 · US
Integrated circuit comprising a capacitor with HSG metal electrodes
US8975682B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8975682-B2 |
| Application number | US-86125610-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 23, 2010 |
| Priority date | Jun 18, 2004 |
| Publication date | Mar 10, 2015 |
| Grant date | Mar 10, 2015 |
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Abstract
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An integrated circuit (IC) includes at least one capacitor with metal electrodes. At least one of the electrodes ( 10 or 30 ) is formed from at least surface-silicided hemispherical grain silicon or silicon alloy. A fabrication process for obtaining such a capacitor with silicided metal electrodes is also provided.
First claim
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What is claimed is: 1. An integrated circuit comprising: a semiconductor substrate having a trench, the trench comprising sidewalls and a bottom; and at least one capacitor in the trench, the capacitor including first and second metal comprising electrodes, and a dielectric layer located between the first and second electrodes, wherein the first electrode of the capacitor comprises hemispherical grain silicon or hemispherical grain silicon alloy on the sidewalls and bottom of…
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Frequently asked questions
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- What does patent US8975682B2 cover?
- An integrated circuit (IC) includes at least one capacitor with metal electrodes. At least one of the electrodes ( 10 or 30 ) is formed from at least surface-silicided hemispherical grain silicon or silicon alloy. A fabrication process for obtaining such a capacitor with silicided metal electrodes is also provided.
- Who is the assignee on this patent?
- Halimaoui Aomar, El Farhane Rebha, Froment Benoit, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H10D1/712. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 10 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).