Method and apparatus for semiconductor testing at low temperature
US-9224659-B2 · Dec 29, 2015 · US
US8970243B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8970243-B2 |
| Application number | US-201213448839-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 17, 2012 |
| Priority date | Apr 20, 2011 |
| Publication date | Mar 3, 2015 |
| Grant date | Mar 3, 2015 |
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A test carrier 10 A comprises: a base board 21 A which holds a die 90 ; and a cover board 31 A which is laid over the base board 21 A so as to cover the die 90 . The test carrier 10 A comprises a seal member 24 which is interposed between the base board 21 A and the cover board 31 A and which surrounds the die 90.
Opening claim text (preview).
The invention claimed is: 1. A test carrier comprising: a base board which directly holds an electronic device; a cover board which is laid over the base board so as to cover an upper surface of the electronic device; and a seal member which is interposed between the base board and the cover board and surrounds the electronic device, wherein the seal member comprises a ring-shaped elastic member, the ring-shaped elastic member has: an inside hole winch is formed to penet…
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