Vented MEMS apparatus and method of manufacture

Patent metadata

Field	Value
Publication number	US-8969980-B2
Application number	US-201213623598-A
Country	US
Kind code	B2
Filing date	Sep 20, 2012
Priority date	Sep 23, 2011
Publication date	Mar 3, 2015
Grant date	Mar 3, 2015

Abstract

A micro-electromechanical system (MEMS) device includes a housing and a base. The base includes a port opening extending therethrough and the port opening communicates with the external environment. The MEMS die is disposed on the base and over the opening. The MEMS die includes a diaphragm and a back plate and the MEMS die, the base, and the housing form a back volume. At least one vent extends through the MEMS die and not through the diaphragm. The at least one vent communicates with the back volume and the port opening and is configured to allow venting between the back volume and the external environment.

First claim

What is claimed is:

1. A micro-electromechanical system (MEMS) device, comprising:
a housing;
a base with a port opening extending therethrough, wherein the port opening communicates with the external environment;
a MEMS die disposed on the base and over the opening, the MEMS die securing a diaphragm and a back plate, wherein the MEMS die, the base, and the housing form a back volume;
wherein a longitudinal axis extends longitudinally through a center of the MEMS die, the di…

Assignees

• Knowles Electronics Llc

Inventors

• Lee Sung Bok

Classifications

• H10W70/681

  Electricity · mapped topic

• B81B2203/0127

  Operations & Transport · mapped topic

• H04R19/005

  Electricity · mapped topic

• H04R2201/003

  Electricity · mapped topic

• H04R19/04

  Electricity · mapped topic