Semiconductor device and method for manufacturing same

US8969941B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8969941-B2
Application numberUS-201313772702-A
CountryUS
Kind codeB2
Filing dateFeb 21, 2013
Priority dateJun 27, 2012
Publication dateMar 3, 2015
Grant dateMar 3, 2015

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  1. Title

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  2. Abstract

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  3. Assignees and inventors

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  4. Key dates

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  5. First independent claim

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  6. CPC / IPC classifications

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  7. Citations and related patents

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Abstract

Official abstract text for this publication.

According to an embodiment, a semiconductor device, includes a semiconductor substrate, first and second transistors. The first transistor includes a first insulating film provided on the semiconductor substrate, a first conductive film provided on the first insulating film, a second insulating film provided on the first conductive film, and a second conductive film provided on the second insulating film. The second transistor is provided to be separated from the first transistor, the second transistor including a third insulating film provided on the semiconductor substrate, a third conductive film provided on the third insulating film, a fourth insulating film provided on the third conductive film, and a fourth conductive film provided on the fourth insulating film. The third conductive film is thicker than the first conductive film, and the second transistor has a through-portion piercing the fourth insulating film to connect the third conductive film and the fourth conductive film.

First claim

Opening claim text (preview).

What is claimed is: 1. A semiconductor device, comprising: at least one NAND string provided on an element region extending in a first direction in a surface of a semiconductor substrate, the NAND string comprising: a memory cell transistor having a stacked gate structure including a first insulating film provided part of the element region, a first conductive film provided on the first insulating film, a second insulating film provided on the first conductive film, and a seco…

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What does patent US8969941B2 cover?
According to an embodiment, a semiconductor device, includes a semiconductor substrate, first and second transistors. The first transistor includes a first insulating film provided on the semiconductor substrate, a first conductive film provided on the first insulating film, a second insulating film provided on the first conductive film, and a second conductive film provided on the second insul…
Who is the assignee on this patent?
Toshiba Kk
What technology area does this patent fall under?
Primary CPC classification H10D30/0411. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Mar 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).