Multi charged particle beam writing apparatus
US-2024242922-A1 · Jul 18, 2024 · US
Multi charged particle beam writing method, and multi charged particle beam writing apparatus
US8969837B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8969837-B2 |
| Application number | US-201414297030-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 5, 2014 |
| Priority date | Jun 10, 2013 |
| Publication date | Mar 3, 2015 |
| Grant date | Mar 3, 2015 |
How to read this patent
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
- Title
What the patent document calls the invention.
- Abstract
A short plain-language summary of the technical disclosure.
- Assignees and inventors
Who owns or filed the patent and who is credited as inventor.
- Key dates
Filing, priority, publication, and grant dates set the timeline.
- First independent claim
The legal scope of protection — read this for what is actually claimed.
- CPC / IPC classifications
Technology tags used to group this patent with similar filings.
- Citations and related patents
Prior art links and similar publications in this corpus.
Abstract
Official abstract text for this publication.
A multi charged particle beam writing method includes dividing a maximum irradiation time per a shot into a digit number of first irradiation time periods, each of which is calculated by multiplying a corresponding second gray scale value by the quantization unit, where second gray scale values are gray scale values defined in decimal numbers converted from each digit value of data of binary numbers; dividing second irradiation time periods, which are a part of the first irradiation time periods into third irradiation time periods; dividing irradiation of each beam into the first irradiation steps of the third irradiation time periods and second irradiation steps of the remaining undivided first irradiation time periods; and irradiating a target object, in order, with the multi beams such that the groups are respectively composed of combination of at least two irradiation steps of first irradiation steps and second irradiation steps and the groups continue in order.
First claim
Opening claim text (preview).
What is claimed is: 1. A multi charged particle beam writing method comprising: converting, for each shot of beams of multiple charged particle beams, a respective first gray scale value of each beam of the multiple charged particle beams, which is obtained by dividing an individual irradiation time period of the each beam by a quantization unit, into respective data of binary numbers of a predetermined digit number set in advance; dividing a maximum irradiation time period per…
Assignees
Inventors
Classifications
- H01J37/3177Primary
Electricity · mapped topic
Physics · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Patent family
Related publications grouped by family.
External sources
Next steps
Free tools are coming soon. Tell us what you want to track and we'll notify you.
Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US8969837B2 cover?
- A multi charged particle beam writing method includes dividing a maximum irradiation time per a shot into a digit number of first irradiation time periods, each of which is calculated by multiplying a corresponding second gray scale value by the quantization unit, where second gray scale values are gray scale values defined in decimal numbers converted from each digit value of data of binary nu…
- Who is the assignee on this patent?
- Nuflare Technology Inc
- What technology area does this patent fall under?
- Primary CPC classification H01J37/3177. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).