Scanning ion beam deposition and etch
US-12176178-B2 · Dec 24, 2024 · US
Scanning electron microscope with a table being guided by rolling friction elements
US8969828B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8969828-B2 |
| Application number | US-201113640560-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 11, 2011 |
| Priority date | May 20, 2010 |
| Publication date | Mar 3, 2015 |
| Grant date | Mar 3, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
This invention stabilizes positioning and provides improved positioning accuracy in a scanning electron microscope provided with stage-driving means utilizing an effect of rolling friction. In this scanning electron microscope that includes a sample stage equipped with an x-table, a y-table, a z-table, a rotation table, and a tilting table, and moved by means of stepping motors each connected to a ball screw via a coupling, a sliding friction element is disposed at a position close to the ball screw, between the x-table and the y-table and between a tilting base and the x-table.
First claim
Opening claim text (preview).
The invention claimed is: 1. A scanning electron microscope in which a sample-moving stage for moving a sample includes an x-table for moving the sample in an x-direction right-angled to an electron beam, a y-table for moving the sample in a y-direction right-angled to the x-direction as well as to the electron beam, the y-table being mounted above the x-table, a z-table configured to move in a same z-direction as the direction in which the electron beam travels, a rotation table f…
Assignees
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Classifications
- H01J37/20Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8969828B2 cover?
- This invention stabilizes positioning and provides improved positioning accuracy in a scanning electron microscope provided with stage-driving means utilizing an effect of rolling friction. In this scanning electron microscope that includes a sample stage equipped with an x-table, a y-table, a z-table, a rotation table, and a tilting table, and moved by means of stepping motors each conne…
- Who is the assignee on this patent?
- Sakamoto Naoki, Takahashi Kaname, Haneda Shigeru, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification H01J37/20. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Mar 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).