Microchannel plate detector and methods for their fabrication

Patent metadata

Field	Value
Publication number	US-8969823-B2
Application number	US-201113011645-A
Country	US
Kind code	B2
Filing date	Jan 21, 2011
Priority date	Jan 21, 2011
Publication date	Mar 3, 2015
Grant date	Mar 3, 2015

Abstract

A multi-component tunable resistive coating and methods of depositing the coating on the surfaces of a microchannel plate (MCP) detector. The resistive coating composed of a plurality of alternating layers of a metal oxide resistive component layer and a conductive component layer composed of at least one of a metal, a metal nitride and a metal sulfide. The coating may further include an emissive layer configured to produce a secondary electron emission in response to a particle interacting with the MCP and a neutron-absorbing layer configured to respond to a neutron interacting with the MCP.

First claim

What is claimed is:

1. A microchannel substrate with a tunable resistive thin layer coating for electron amplification comprising:
a microchannel substrate having a front surface and a rear surface, the microchannel substrate including a plurality of channels extending substantially parallel through the substrate between the front surface and the rear surface;
a multi-component resistive coating conformally coating the surfaces of the plurality of channels within the microchanne…

Assignees

• Elam Jeffrey W
• Mane Anil U
• Peng Qing
• Uchicago Argonne Llc

Inventors

• Elam Jeffrey W
• Mane Anil U
• Peng Qing

Classifications

• H01J43/246 Primary

  Electricity · mapped topic

• C23C16/45555

  Chemistry & Metallurgy · mapped topic

• C23C16/45529

  Chemistry & Metallurgy · mapped topic