Arrangement for mirror temperature measurement and/or thermal actuation of a mirror in a microlithographic projection exposure apparatus
US-9207541-B2 · Dec 8, 2015 · US
Infrared sensor device
US8969810B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8969810-B2 |
| Application number | US-201313795669-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 12, 2013 |
| Priority date | Mar 13, 2012 |
| Publication date | Mar 3, 2015 |
| Grant date | Mar 3, 2015 |
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Abstract
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An infrared sensor device includes a plurality of infrared sensors that is provided in a plurality of divided areas in which an infrared-receiving area is radially divided in one plane; a detector that detects presence or absence of movement of an object in the infrared-receiving area for each of the divided areas based on an output of the infrared sensor; and a determiner that determines whether the object is in a detection area in a predetermined distance range from the infrared sensor, based on an arrangement pattern of the divided areas in which the movement of the object is detected, in an alignment of the divided areas in the infrared-receiving areas.
First claim
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What is claimed is: 1. An infrared sensor device comprising: a plurality of infrared sensors that is provided in a plurality of divided areas in which an infrared-receiving area is radially divided in one plane; a detector that detects, for each divided area amongst the divided areas, presence or absence of movement of an object in the infrared-receiving area based on signals output from the plurality of infrared sensors; and a determiner that determines whether the object is…
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- What does patent US8969810B2 cover?
- An infrared sensor device includes a plurality of infrared sensors that is provided in a plurality of divided areas in which an infrared-receiving area is radially divided in one plane; a detector that detects presence or absence of movement of an object in the infrared-receiving area for each of the divided areas based on an output of the infrared sensor; and a determiner that determines wheth…
- Who is the assignee on this patent?
- Nagahisa Takeshi, Aisu Katsuhiko, Watanabe Hirofumi, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification G01J5/02. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).