Optical devices
US-11867562-B2 · Jan 9, 2024 · US
US8969809B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8969809-B2 |
| Application number | US-201213730910-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 29, 2012 |
| Priority date | Dec 29, 2012 |
| Publication date | Mar 3, 2015 |
| Grant date | Mar 3, 2015 |
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Thermo-optical array devices and methods of processing thermo-optical array devices are disclosed. One method of processing thermo-optical array devices includes forming an (001) oriented titanium dioxide material on a bolometer material, and forming a vanadium dioxide material on the (001) oriented titanium dioxide material. One thermo-optical array device includes a bolometer material, a titanium dioxide material on the bolometer material, and a vanadium dioxide material on the titanium dioxide material, wherein the vanadium dioxide material has an optical transition temperature of less than 67 degrees Celsius.
Opening claim text (preview).
What is claimed: 1. A method of processing a thermo-optical array device, comprising: forming an (001) oriented titanium dioxide material on a bolometer material; and forming a vanadium dioxide material on the (001) oriented titanium dioxide material. 2. The method of claim 1 , wherein forming the (001) oriented titanium dioxide material on the bolometer material includes forming titanium dioxide atoms on the bolometer material by applying an ion beam to a…
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