Digital Roller Mold Manufacturing System
US-2016349618-A1 · Dec 1, 2016 · US
Method for functionalising fluid lines contained in a micromechanical device, micromechanical device including functionalised lines, and method for manufacturing same
US8968673B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8968673-B2 |
| Application number | US-201113805491-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 29, 2011 |
| Priority date | Jun 29, 2010 |
| Publication date | Mar 3, 2015 |
| Grant date | Mar 3, 2015 |
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Abstract
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The present invention relates to a method for functionalizing fluid lines ( 1 b ) in a micromechanical device, the walls of which include an opaque layer. For this purpose, the invention provides a method for functionalizing a micromechanical device provided with a fluid line including a peripheral wall ( 5 ) having a surface ( 2 ) outside the line and an inner surface ( 3 ) defining a space ( 1 b ) in which a fluid can circulate, the peripheral wall at least partially including a silicon layer ( 5 a ). The method includes the following steps: a) providing a device, the peripheral wall ( 5 ) of which at least partially includes a silicon layer ( 5 a ) having, at least locally, a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm; c) silanizing at least the inner surface of the fluid line; d) the localized, selective photo-deprotection on at least the inner surface of the silanized device by exposing the peripheral wall ( 5 ) at the point at which said wall has a thickness (e) of more than 100 nm and less than 200 nm, advantageously of 160 to 180 nm.
First claim
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The invention claimed is: 1. A method for functionalizing a micromechanical device provided with a fluid line comprising a peripheral wall having a surface external to the line and an internal surface delimiting a space in which a fluid can circulate, the peripheral wall comprising at least partially a layer of silicon, wherein the method comprises the following steps: a) the provision of a device whose peripheral wall at least partially comprises a layer of silicon having, at lea…
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Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Mechanical Engineering · mapped topic
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- What does patent US8968673B2 cover?
- The present invention relates to a method for functionalizing fluid lines ( 1 b ) in a micromechanical device, the walls of which include an opaque layer. For this purpose, the invention provides a method for functionalizing a micromechanical device provided with a fluid line including a peripheral wall ( 5 ) having a surface ( 2 ) outside the line and an inner surface ( 3 ) defining a space …
- Who is the assignee on this patent?
- Agache Vincent, Hoang Antoine, Vinet Françoise, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification G03F7/24. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Mar 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).