Multicathode deposition system and methods
US-12051576-B2 · Jul 30, 2024 · US
US8968477B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8968477-B2 |
| Application number | US-57500109-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 7, 2009 |
| Priority date | Jul 15, 2004 |
| Publication date | Mar 3, 2015 |
| Grant date | Mar 3, 2015 |
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A deposition mask for manufacturing an organic light emitting display (OLED) using the same are provided. The deposition mask is intended for preventing an organic film from being damaged due to touching of a blocked-off portion of the mask to an emission layer (EML), or chemical transition from being generated at the organic film. For that purpose, the deposition mask stuck to a substrate of the OLED to deposit an organic EML includes an opening and an indentation. The opening is opened so as to deposit the organic EML. The indentation is indented a predetermined depth from a plane facing the substrate.
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What is claimed is: 1. A deposition mask, comprising: a planar portion; and unit masks, each unit mask comprising: a single first opening and two first indentations arranged in a first row in the planar portion; and a plurality of second openings and a plurality of second indentations arranged in a second row in the planar portion, wherein: the first and second openings are configured to permit deposition of an organic emission layer on a substrate of an organic light e…
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