Methods for measuring a magnetic core layer profile in an integrated circuit
US-2025311251-A1 · Oct 2, 2025 · US
US8966979B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8966979-B2 |
| Application number | US-201013146950-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 15, 2010 |
| Priority date | Jan 30, 2009 |
| Publication date | Mar 3, 2015 |
| Grant date | Mar 3, 2015 |
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A method of measuring the thickness of any deposit of material ( 28 ) on an inner wall ( 12 ) of a structure ( 14 ). The method comprises: (a) causing vibrations in the structure; (b) detecting said vibrations in the structure; (c) determining a resonance frequency of the structure based on the detected vibrations; and (d) determining the thickness of any deposit of material on the inner wall of the structure based on the determined resonance frequency.
Opening claim text (preview).
The invention claimed is: 1. A method of measuring the thickness of a deposit of material on an inner wall of a structure, the method comprising: (a) heating a portion of the structure; (b) detecting vibrations at the heated portion; (c) detecting vibrations at an unheated portion of the structure; (d) determining a resonance frequency or frequencies of the structure at the unheated portion of the structure based on the vibrations detected at (c); and (e) determining the t…
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