Thermo-mechanical actuator
US-12117739-B2 · Oct 15, 2024 · US
Stage device, exposure apparatus and method of producing device
US8964166B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8964166-B2 |
| Application number | US-31474508-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 16, 2008 |
| Priority date | Dec 17, 2007 |
| Publication date | Feb 24, 2015 |
| Grant date | Feb 24, 2015 |
How to read this patent
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
- Title
What the patent document calls the invention.
- Abstract
A short plain-language summary of the technical disclosure.
- Assignees and inventors
Who owns or filed the patent and who is credited as inventor.
- Key dates
Filing, priority, publication, and grant dates set the timeline.
- First independent claim
The legal scope of protection — read this for what is actually claimed.
- CPC / IPC classifications
Technology tags used to group this patent with similar filings.
- Citations and related patents
Prior art links and similar publications in this corpus.
Abstract
Official abstract text for this publication.
A stage device is provided with a mobile body retaining a mask illuminated with exposure light and moving along a predetermined plane, and a flow control section moving substantially together with the movement of the mobile body so as to control the flow of gas in proximity to the mask thereby.
First claim
Opening claim text (preview).
What is claimed is: 1. A stage device comprising: a chamber forming an inner space; a mobile member in the inner space and having a retaining section, which is configured to retain a mask illuminated with exposure light, the mobile member being configured to move along a predetermined plane including an illumination position of the exposure light when the retaining section retains the mask; and an intake structure in the inner space, the intake structure being configured to mo…
Assignees
Inventors
Classifications
- G03F7/70875Primary
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
- G03B27/58Primary
Physics · mapped topic
Patent family
Related publications grouped by family.
External sources
Next steps
Free tools are coming soon. Tell us what you want to track and we'll notify you.
Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US8964166B2 cover?
- A stage device is provided with a mobile body retaining a mask illuminated with exposure light and moving along a predetermined plane, and a flow control section moving substantially together with the movement of the mobile body so as to control the flow of gas in proximity to the mask thereby.
- Who is the assignee on this patent?
- Shibazaki Yuichi, Nikon Corp
- What technology area does this patent fall under?
- Primary CPC classification G03F7/70875. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Feb 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).