Piezoelectric device and method for manufacturing thereof

Patent metadata

Field	Value
Publication number	US-8963403-B2
Application number	US-201113310109-A
Country	US
Kind code	B2
Filing date	Dec 2, 2011
Priority date	Dec 7, 2010
Publication date	Feb 24, 2015
Grant date	Feb 24, 2015

Abstract

In a piezoelectric device, a lower covering layer, a piezoelectric material layer, a lower electrode layer, and an upper electrode layer, which define common layers, and an upper covering layer, which defines a specific layer, are laminated on a substrate. The piezoelectric material layer is sandwiched between a pair of electrodes. First to third vibration regions are provided in which the electrodes are superimposed with the piezoelectric material layer therebetween when viewed in a transparent manner in the direction in which the layers are laminated. The upper covering layer includes only a portion having with a first thickness in the first vibration region, includes a portion having the first thickness and a portion having a second thickness that is smaller than the first thickness in the second vibration region, and includes only a portion having the second thickness in the third vibration region.

First claim

What is claimed is:

1. A piezoelectric device comprising:
a substrate;
at least two common layers; and
at least one specific layer, the at least two common layers and the at least one specific layer being laminated on the substrate; wherein
the at least two common layers and the at least one specific layer are arranged such that only a single piezoelectric material layer is sandwiched between a pair of electrodes including a lower electrode layer and an upper electrode layer…

Assignees

• Yamane Takashi
• Murata Manufacturing Co

Inventors

• Yamane Takashi

Classifications

• H03H2003/0471

  Electricity · mapped topic

• H03H9/568

  Electricity · mapped topic

• H03H9/564

  Electricity · mapped topic

• H03H9/132

  Electricity · mapped topic

• H03H3/04 Primary

  Electricity · mapped topic