Thermally stable volatile film precursors

US8962876B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8962876-B2
Application numberUS-201013319793-A
CountryUS
Kind codeB2
Filing dateMay 17, 2010
Priority dateMay 15, 2009
Publication dateFeb 24, 2015
Grant dateFeb 24, 2015

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Abstract

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A precursor for the deposition of a thin film by atomic layer deposition is provided. The compound has the formula MxLy where M is a metal and L is an amidrazone-derived ligand or an amidate-derived ligand. A process of forming a thin film using the precursors is also provided.

First claim

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What is claimed is: 1. A compound having formula 1: M x L y   1 wherein M is a transition metal; x is 1 or 2; y is an integer from 1 to 4; L is N(R 1 R 2 )—N═C(R 3 )—O or OC(R 4 )—N(R 5 ); R 1 , R 2 , R 3 , R 4 , R 5 are each independently hydrogen, C 1-12 alkyl or C 6-12 aryl, Si(R 6 ) 3 , or Ge(R 6 ) 3 ; and R 6 is hydrogen, C 1-12 alkyl or C 6-12 aryl, wherein y is 2 when x is 1 and y is 4 when x is 2. 2. The compound of clai…

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What does patent US8962876B2 cover?
A precursor for the deposition of a thin film by atomic layer deposition is provided. The compound has the formula MxLy where M is a metal and L is an amidrazone-derived ligand or an amidate-derived ligand. A process of forming a thin film using the precursors is also provided.
Who is the assignee on this patent?
Winter Charles H, Knisley Thomas Joseph, Karunarathne Panditha Koralalage Don Mahesh Chinth, and 1 more
What technology area does this patent fall under?
Primary CPC classification C07C233/05. Mapped technology areas include Chemistry & Metallurgy.
When was this patent published?
Publication date Tue Feb 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).