Novel compounds as hif-1 alpha inhibitors and manufacturing process thereof
US-2016193215-A1 · Jul 7, 2016 · US
US8962876B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8962876-B2 |
| Application number | US-201013319793-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 17, 2010 |
| Priority date | May 15, 2009 |
| Publication date | Feb 24, 2015 |
| Grant date | Feb 24, 2015 |
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A precursor for the deposition of a thin film by atomic layer deposition is provided. The compound has the formula MxLy where M is a metal and L is an amidrazone-derived ligand or an amidate-derived ligand. A process of forming a thin film using the precursors is also provided.
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What is claimed is: 1. A compound having formula 1: M x L y 1 wherein M is a transition metal; x is 1 or 2; y is an integer from 1 to 4; L is N(R 1 R 2 )—N═C(R 3 )—O or OC(R 4 )—N(R 5 ); R 1 , R 2 , R 3 , R 4 , R 5 are each independently hydrogen, C 1-12 alkyl or C 6-12 aryl, Si(R 6 ) 3 , or Ge(R 6 ) 3 ; and R 6 is hydrogen, C 1-12 alkyl or C 6-12 aryl, wherein y is 2 when x is 1 and y is 4 when x is 2. 2. The compound of clai…
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
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