Multi-nozzle organic vapor jet printing

Patent metadata

Field	Value
Publication number	US-8962383-B2
Application number	US-201414246737-A
Country	US
Kind code	B2
Filing date	Apr 7, 2014
Priority date	Aug 27, 2012
Publication date	Feb 24, 2015
Grant date	Feb 24, 2015

Abstract

Systems and methods are provided for depositing thin patterned films of materials in which individual elements of the patterned film are deposited by two or more nozzles having different geometries. The different nozzle geometries may include one or more of different throttle diameters, different exhaust diameters, different cross-sectional shapes, different bore angles, different wall angles, different exhaust distances from the substrate, and different leading edges relative to the direction of movement of the nozzles or the substrate. Methods may include steps of ejecting a carrier gas and a material from a plurality of nozzles and depositing the material on a substrate in a plurality of laterally spaced elements.

First claim

The invention claimed is:

1. A method of depositing a thin film on a substrate comprising:
ejecting a carrier gas and a material from a plurality of nozzles while moving the nozzles or the substrate relative to one another,
wherein the material is deposited on the substrate from at least two of the nozzles, the at least two of the nozzles including different geometries;
wherein the at least two nozzles include two or more relatively small nozzles and a relatively large nozzle,…

Assignees

• Universal Display Corp

Inventors

• Mohan Siddarth Harikrishna
• Burrows Paul E

Classifications

• C23C14/12

  Chemistry & Metallurgy · mapped topic

• B05B13/04

  Operations & Transport · mapped topic

• C23C14/228

  Chemistry & Metallurgy · mapped topic

• B05B1/02

  Operations & Transport · mapped topic

• H10K71/12 Primary

  Electricity · mapped topic