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US-2024414942-A1 · Dec 12, 2024 · US
US8962377B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8962377-B2 |
| Application number | US-201213713744-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 13, 2012 |
| Priority date | Dec 13, 2012 |
| Publication date | Feb 24, 2015 |
| Grant date | Feb 24, 2015 |
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Official abstract text for this publication.
A method of fabricating a pixelated imager includes providing a substrate with bottom contact layer and sensing element blanket layers on the contact layer. The blanket layers are separated into an array of sensing elements by trenches isolating adjacent sensing elements. A sensing element electrode is formed adjacent each sensing element overlying a trench and defining a TFT. A layer of metal oxide semiconductor (MOS) material is formed on a dielectric layer overlying the electrodes and on an exposed upper surface of the blanket layers defining the sensing element adjacent each TFT. A layer of metal is deposited on each TFT and separated into source/drain electrodes on opposite sides of the sensing element electrode. The metal forming one of the S/D electrodes contacts the MOS material overlying the exposed surface of the semiconductor layer, whereby each sensing element in the array is electrically connected to the adjacent TFT by the MOS material.
Opening claim text (preview).
Having fully described the invention in such clear and concise terms as to enable those skilled in the art to understand and practice the same, the invention claimed is: 1. A method of fabricating a pixelated imager comprising the steps of: providing a substrate with a bottom contact layer and sensing element blanket layers deposited or grown on the bottom contact layer; separating the sensing element blanket layers into an array of sensing elements with trenches isolating adjac…
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