Pixelated imager with motfet and process

US8962377B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8962377-B2
Application numberUS-201213713744-A
CountryUS
Kind codeB2
Filing dateDec 13, 2012
Priority dateDec 13, 2012
Publication dateFeb 24, 2015
Grant dateFeb 24, 2015

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Abstract

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A method of fabricating a pixelated imager includes providing a substrate with bottom contact layer and sensing element blanket layers on the contact layer. The blanket layers are separated into an array of sensing elements by trenches isolating adjacent sensing elements. A sensing element electrode is formed adjacent each sensing element overlying a trench and defining a TFT. A layer of metal oxide semiconductor (MOS) material is formed on a dielectric layer overlying the electrodes and on an exposed upper surface of the blanket layers defining the sensing element adjacent each TFT. A layer of metal is deposited on each TFT and separated into source/drain electrodes on opposite sides of the sensing element electrode. The metal forming one of the S/D electrodes contacts the MOS material overlying the exposed surface of the semiconductor layer, whereby each sensing element in the array is electrically connected to the adjacent TFT by the MOS material.

First claim

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Having fully described the invention in such clear and concise terms as to enable those skilled in the art to understand and practice the same, the invention claimed is: 1. A method of fabricating a pixelated imager comprising the steps of: providing a substrate with a bottom contact layer and sensing element blanket layers deposited or grown on the bottom contact layer; separating the sensing element blanket layers into an array of sensing elements with trenches isolating adjac…

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What does patent US8962377B2 cover?
A method of fabricating a pixelated imager includes providing a substrate with bottom contact layer and sensing element blanket layers on the contact layer. The blanket layers are separated into an array of sensing elements by trenches isolating adjacent sensing elements. A sensing element electrode is formed adjacent each sensing element overlying a trench and defining a TFT. A layer of metal …
Who is the assignee on this patent?
Shieh Chan-Long, Yu Gang, Cbrite Inc
What technology area does this patent fall under?
Primary CPC classification H10D86/423. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Feb 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).