Radiation detector and method of manufacturing the same

Patent metadata

Field	Value
Publication number	US-8962370-B2
Application number	US-201313919603-A
Country	US
Kind code	B2
Filing date	Jun 17, 2013
Priority date	Jul 12, 2012
Publication date	Feb 24, 2015
Grant date	Feb 24, 2015

Abstract

A radiation detector includes a sensor substrate and a scintillator layer. The sensor substrate is configured to be capable of performing photoelectric conversion. The scintillator layer includes a first area and a second area, the first area including an activator, the second area including the activator with a concentration lower than the concentration of the activator in the first area, the scintillator layer being provided on the sensor substrate so that the first area and the second area are arranged in a thickness direction of the scintillator layer and the first area is arranged from an end portion on a side of the sensor substrate in the scintillator layer in the thickness direction.

First claim

The invention is claimed as follows:

1. A radiation detector, comprising:
a sensor substrate configured to perform photoelectric conversion; and
a scintillator layer including a first area and a second area, the first area including an activator, the second area including the activator with a concentration lower than a concentration of the activator in the first area, the scintillator layer being provided on the sensor substrate such that the first area is arranged between the second area and the sensor substrate in a thickness direction of the scintillator layer.

2. The radiation detector according to claim 1 , wherein the scintillator layer has a thickness of not less than 300 μm and not more than 800 μm.

3. The radiation detector according to claim 1 , wherein the scintillator layer includes a phosphor material of CsI as a main component, and the activator includes TI.

4. The radiation detector according to claim 1 , wherein the first area has a thickness of not less than 2% and not more than 20% of a thickness of the scintillator layer.

5. The radiation detector according to claim 4 , wherein the thickness of the first area is not less than 5% and not more than 15% of the thickness of the scintillator layer.

6. The radiation detector according to claim 1 , wherein the concentration of the activator in the first area is not less than 1.1 times and not more than 1.3 times that in the second area.

7. The radiation detector according to claim 1 , wherein the concentration of the activator in the first area is 1.2 times that in the second area.

8. The radiation detector according to claim 1 , further comprising a counter substrate formed on the second area to provide protection to the scintillator layer.

9. A radiation detector, comprising:
a sensor substrate configured to be capable of performing photoelectric conversion;
a counter substrate provided so as to face the sensor substrate; and
a scintillator layer provided on the sensor substrate between the sensor substrate and the counter substrate so as to have a thickness of not less than 300 μm and not more than 800 μm, the scintillator layer including a first area and a second area, the first area including an activator and being provided so as to have a thickness of not less than 10 μm and not more than 100 μm, the second area including the activator with a concentration lower than the concentration of the activator in the first area, the scintillator layer being provided on the sensor substrate so that the first area and the second area are arranged in a thickness direction of the scintillator layer and the first area is arranged from an end portion on a side of the counter substrate in the scintillator layer in the thickness direction.

10. A method of manufacturing a radiation detector, comprising:
forming a first area on a sensor substrate, the first area including an activator, the sensor substrate being configured to perform photoelectric conversion; and
forming a scintillator layer by forming a second area on the formed first area, wherein the second area includes the activator with a concentration lower than a concentration of the activator in the first area adjacent to the sensor substrate, wherein the scintillator layer includes the first area and the second area.

11. The method according to claim 10 , wherein the first area is formed to have a thickness of not less than 2% and not more than 20% of a thickness of the scintillator layer.

12. The method according to claim 11 , wherein the thickness of the first area is not less than 5% and not more than 15% of the thickness of the scintillator layer.

13. The method according to claim 10 , wherein the concentration of the activator in the first area is not less than 1.1 times and not more than 1.3 times that in the second area.

14. The method according to claim 10 , wherein the concentration of the activator in the first area is 1.2 times that in the second area.

15. A method of manufacturing a radiation detector, comprising:
forming a first area on a sensor substrate, the first area including an activator and being provided so as to have a thickness of not less than 10 μm and not more than 100 μm; and
forming a scintillator layer by forming a second area on the formed first area, the second area including the activator with a concentration lower than the concentration of the activator in the first area, the scintillator layer including the first area and the second area, wherein the scintillator layer formed on the sensor substrate between the sensor substrate and a counter substrate and having a thickness of not less than 300 μm and not more than 800 μm, wherein the counter substrate provided so as to face the sensor substrate.

Assignees

• Sony Corp

Inventors

• Kawanishi Mitsuhiro
• Kusayama Ikumi
• Igarashi Takahiro

Classifications

• H10F77/496

  Luminescent members, e.g. fluorescent sheets (wavelength conversion means for photovoltaic cells H10F77/45) · CPC title

• H10F39/1898

  Indirect radiation image sensors, e.g. using luminescent members · CPC title

• H10F30/29 Primary

  the devices being sensitive to radiation having very short wavelengths, e.g. X-rays, gamma-rays or corpuscular radiation · CPC title

• H01L31/115 Primary

  Electricity · mapped topic

• G01T1/20187

  Position of the scintillator with respect to the photodiode, e.g. photodiode surrounding the crystal, the crystal surrounding the photodiode, shape or size of the scintillator · CPC title