Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article
US-2024393682-A1 · Nov 28, 2024 · US
US8961851B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8961851-B2 |
| Application number | US-91364910-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 27, 2010 |
| Priority date | Dec 23, 2009 |
| Publication date | Feb 24, 2015 |
| Grant date | Feb 24, 2015 |
A practical reading order for non-experts. Skip the full description unless you need deep technical detail.
What the patent document calls the invention.
A short plain-language summary of the technical disclosure.
Who owns or filed the patent and who is credited as inventor.
Filing, priority, publication, and grant dates set the timeline.
The legal scope of protection — read this for what is actually claimed.
Technology tags used to group this patent with similar filings.
Prior art links and similar publications in this corpus.
Official abstract text for this publication.
A fabricating apparatus and a method of a flat plate display are disclosed. A fabricating apparatus of a flat plate display includes a stage on which a substrate having liquid resin formed thereon is seated, a imprinting mold bonded with the liquid resin of the substrate to form a thin film pattern on the substrate, the imprinting mold comprises projections and grooves, and a planarization layer formed between the stage and the substrate to planarize a surface of the stage.
Opening claim text (preview).
What is claimed is: 1. A fabricating method of a flat plate display comprising steps of: forming a planarization layer on a stage to planarize a surface of the stage; seating a substrate having liquid polymeric precursor formed thereon on the planarization layer; bonding an imprinting mold and the substrate with each other, the imprinting mold comprising grooves and projections to press the liquid polymeric precursor to form a thin film pattern having a shape transferred from…
Physics · mapped topic
Physics · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Operations & Transport · mapped topic
Related publications grouped by family.
Free tools are coming soon. Tell us what you want to track and we'll notify you.
Answers are generated from the same data shown on this page.