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Electrolytic process using cation permeable barrier
US8961771B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8961771-B2 |
| Application number | US-201213559494-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jul 26, 2012 |
| Priority date | Apr 13, 1999 |
| Publication date | Feb 24, 2015 |
| Grant date | Feb 24, 2015 |
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Abstract
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Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and a cation permeable barrier layer. The cation permeable barrier layer separates the first processing fluid from the second processing fluid while allowing certain cationic species to transfer between the two fluids. The described processes produce deposits over repeated plating cycles that exhibit deposit properties (e.g., resistivity) within desired ranges.
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The embodiments of the invention in which an exclusive property or privilege is claimed are defined as follows: 1. A process for electrolytically processing a microfeature workpiece as the working electrode with a first processing fluid and a counter electrode, comprising: providing a microfeature workpiece comprising a nonmetallic substrate having a dielectric layer disposed over a substrate and a continuous metal feature disposed on the dielectric layer and having microfeatures…
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- What does patent US8961771B2 cover?
- Processes and systems for electrolytically processing a microfeature workpiece with a first processing fluid and an anode are described. Microfeature workpieces are electrolytically processed using a first processing fluid, an anode, a second processing fluid, and a cation permeable barrier layer. The cation permeable barrier layer separates the first processing fluid from the second processing…
- Who is the assignee on this patent?
- Baskaran Rajesh, Batz Jr Robert W, Kim Bioh, and 4 more
- What technology area does this patent fall under?
- Primary CPC classification C25D21/12. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Feb 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).