Substrate temperature measuring device, substrate processing apparatus including the same, and substrate temperature measuring method using the same
US-2024019311-A1 · Jan 18, 2024 · US
US8961007B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8961007-B2 |
| Application number | US-201213417448-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 12, 2012 |
| Priority date | Mar 15, 2011 |
| Publication date | Feb 24, 2015 |
| Grant date | Feb 24, 2015 |
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A method of forming a thermocouple ( 12 ), including: depositing a first material on a component ( 10 ) to form a first leg ( 14 ); depositing a second material through a mask ( 30 ) to form a pattern ( 50 ) on the component ( 10 ), the pattern ( 50 ) forming a plurality of discrete second leg junction ends ( 20 ) and a continuous patch ( 52 ) of the second material comprising indiscrete lead ends of the second legs ( 16 ), each second leg junction end ( 20 ) spanning from a respective junction ( 18 ) with the first leg ( 14 ) to the continuous patch ( 52 ); and laser-ablating the continuous patch ( 52 ) to form discrete lead ends ( 22 ) of the second legs ( 16 ), each lead end ( 22 ) electrically connected to a respective junction end ( 20 ), thereby forming discrete second legs ( 16 ).
Opening claim text (preview).
The invention claimed is: 1. A method of forming a thermocouple on a contoured gas turbine hot gas path component, the method comprising: depositing a first material on the contoured gas turbine engine hot gas path component to form a first leg of the thermocouple; depositing a second material through a mask to form a pattern of the second material on the component, the pattern forming a plurality of discrete second leg junction ends and a continuous patch of the second material…
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Chemistry & Metallurgy · mapped topic
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