Three-axis rotational acceleration sensor
US-2016370402-A1 · Dec 22, 2016 · US
Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8960002B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8960002-B2 |
| Application number | US-201113096732-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 28, 2011 |
| Priority date | Dec 10, 2007 |
| Publication date | Feb 24, 2015 |
| Grant date | Feb 24, 2015 |
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Abstract
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Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.
First claim
Opening claim text (preview).
What is claimed is: 1. A rotational sensor comprising: a sense substrate; an actuator layer; the actuator layer comprising at least two proof masses capable of rotating about a Z-axis normal to plane of the sense substrate wherein each of the at least two proof masses being anchored to the sense substrate via at least one flexure; at least two transducers that can sense rotation of the at least two proof masses about Z-axis; and a circuit coupled to the at least two transduc…
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- G01P15/0888Primary
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Operations & Transport · mapped topic
Physics · mapped topic
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Frequently asked questions
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- What does patent US8960002B2 cover?
- Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/o…
- Who is the assignee on this patent?
- Nasiri Steven S, Yaralioglu Goksen G, Seeger Joseph, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification G01P15/0888. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Feb 24 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).