Detection device, sensor device, and electronic device
US-9222838-B2 · Dec 29, 2015 · US
Infrared detecting element, method for manufacturing infrared detecting element, and electronic device
US8957375B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8957375-B2 |
| Application number | US-201213601274-A |
| Country | US |
| Kind code | B2 |
| Filing date | Aug 31, 2012 |
| Priority date | Sep 7, 2011 |
| Publication date | Feb 17, 2015 |
| Grant date | Feb 17, 2015 |
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Abstract
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The infrared detecting element has a base plate; an insulating film that is provided on the base plate and has a recessed portion surrounding a hollow space; a supporting section that is held by a beam, one end of the beam being fixed to the insulating film, and is located in an area that opposes the hollow space; and an infrared detecting section that is provided on the supporting section and detects infrared rays, in which the recessed portion is covered with a water repellent film that includes polysilicon, and the beam and the supporting section include silicon nitride or silicon carbonitride.
First claim
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What is claimed is: 1. An infrared detecting element comprising: a base plate; an insulating film that is provided on the base plate and has a recessed portion; a supporting section that is held by a beam, one end of the beam being fixed to the base plate, and is located above the recessed portion such that a hollow space stands between the supporting section and the recessed portion; and an infrared detecting section that is provided on the supporting section and detects in…
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Frequently asked questions
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- What does patent US8957375B2 cover?
- The infrared detecting element has a base plate; an insulating film that is provided on the base plate and has a recessed portion surrounding a hollow space; a supporting section that is held by a beam, one end of the beam being fixed to the insulating film, and is located in an area that opposes the hollow space; and an infrared detecting section that is provided on the supporting section and …
- Who is the assignee on this patent?
- Miyashita Kazuyuki, Seiko Epson Corp
- What technology area does this patent fall under?
- Primary CPC classification G01J5/34. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Feb 17 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).