Process isolation diaphragm assembly for metal process seal
US-2015377733-A1 · Dec 31, 2015 · US
US8957348B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8957348-B2 |
| Application number | US-201113639156-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 10, 2011 |
| Priority date | May 14, 2010 |
| Publication date | Feb 17, 2015 |
| Grant date | Feb 17, 2015 |
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A welding equipment that forms an end part includes a vacuum chamber; a holding member that is installed in the vacuum chamber and that holds the end part in which a welding groove is formed by placing a half cell, an end plate, and a beam pipe next to each other; a window that is installed in a top-end surface portion of the vacuum chamber, which intersects with an axial center of the end part, and that forms a portion thereof; a laser radiating head that is installed outside the vacuum chamber and that radiates a laser beam into an internal space of the end part through the window; and a mirror member that is installed in the internal space of the end part and that adjusts a reflected laser beam, formed by reflecting the laser beam, so as to be oriented perpendicular to the welding groove.
Opening claim text (preview).
The invention claimed is: 1. A welding equipment in which a plurality of annular bodies having openings at both ends in an axial direction are placed one after another in the axial direction and that forms an annular joined body by joining the corresponding openings with each other by laser welding, the welding equipment comprising: a vacuum compartment in which a vacuum atmosphere can be established; a holding member that is installed in the vacuum compartment and that holds th…
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