Hardmask composition, hardmask layer, and method of forming patterns
US-2024377746-A1 · Nov 14, 2024 · US
US8957151B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8957151-B2 |
| Application number | US-201313758180-A |
| Country | US |
| Kind code | B2 |
| Filing date | Feb 4, 2013 |
| Priority date | Feb 17, 2012 |
| Publication date | Feb 17, 2015 |
| Grant date | Feb 17, 2015 |
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Provided are a liquid-repellent film in which the aggregation of a liquid-repellent material is suppressed and which is excellent in liquid-repellent properties and a production method therefor, and a fine structure using the liquid-repellent film and a production method therefor. The liquid-repellent film is a liquid-repellent film formed of a silane compound having a specific perfluoropolyether group and a fluorine-containing acrylic homopolymer.
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What is claimed is: 1. A liquid-repellent film, comprising: any one of silane compounds having a perfluoropolyether group represented by the following formulae (1), (2), and (3); and a fluorine-containing acrylic homopolymer which is a homopolymerized product of a monomer represented by the following formula (4): Rf I -X I —SiR I a Y I 3-a Formula (1) in the formula (1), Rf I represents a perfluoropolyether group, R I represents a hydrolyzable substituent…
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