Encapsulated component comprising a mems component and method for the production thereof
US-2015344296-A1 · Dec 3, 2015 · US
US8956444B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8956444-B2 |
| Application number | US-201313795580-A |
| Country | US |
| Kind code | B2 |
| Filing date | Mar 12, 2013 |
| Priority date | Mar 13, 2012 |
| Publication date | Feb 17, 2015 |
| Grant date | Feb 17, 2015 |
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The invention relates to a vent array comprising a plurality of venting regions comprising a porous PTFE matrix material and a nonporous material comprising a substrate material having a plurality of perforations, wherein the substrate material fills the pores of a porous PTFE matrix material to form nonporous regions, the nonporous regions interconnecting the plurality of venting regions.
Opening claim text (preview).
What is claimed is: 1. A vent array comprising: a. a plurality of venting regions comprising a porous PTFE matrix, and b. a nonporous matrix material comprising a substrate material having a plurality of perforations, wherein the substrate material fills the pores of the porous PTFE matrix to form nonporous regions, the nonporous regions interconnecting the plurality of venting regions. 2. The vent array of claim 1 in which the porous PTFE matrix is oleophobic. 3. The vent array of claim 1 in which the substrate material is a dielectric material. 4. The vent array of claim 1 in which the substrate material is an epoxy. 5. The vent array of claim 1 in which the substrate material is polyimide. 6. The vent array of claim 1 having a thickness of less than 200 micron. 7. The vent array of claim 1 further comprising an attachment layer. 8. A vent array that is gas permeable comprising: a plurality of venting regions comprising a porous polymeric matrix material that is liquid impermeable and gas permeable, and a nonporous matrix material comprising a substrate material having a plurality of gas permeable perforations, wherein the substrate material fills pores of the porous polymeric matrix material in some regions to form nonporous regions, the nonporous regions interconnecting the plurality of venting regions. 9. The vent array of claim 8 wherein the porous polymeric matrix material comprises a porous PTFE matrix. 10. The vent array of claim 9 wherein the porous PTFE matrix is oleophobic. 11. The vent array of claim 8 wherein the substrate material comprises a thermoplastic. 12. The vent array of claim 8 wherein the substrate material comprises a dielectric material. 13. The vent array of claim 8 wherein the substrate material comprises an epoxy. 14. The vent array of claim 8 wherein the substrate material comprises polyimide. 15. The vent array of claim 8 having a thickness of less than 200 micron. 16. The vent array of claim 8 further comprising an attachment layer. 17. The vent array of claim 8 wherein the porous polymeric material matrix is laminated to the substrate material.
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