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Micromechanical angular acceleration sensor and method for measuring an angular acceleration
US8950258B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8950258-B2 |
| Application number | US-201213479746-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 24, 2012 |
| Priority date | May 24, 2011 |
| Publication date | Feb 10, 2015 |
| Grant date | Feb 10, 2015 |
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Abstract
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A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is arranged in a cutout of the seismic mass. A corresponding method and uses of the sensor are also disclosed.
First claim
Opening claim text (preview).
What is claimed is: 1. A micromechanical angular acceleration sensor for measuring an angular acceleration, comprising: a substrate; a seismic mass defining a cutout; at least one suspension directly engaged to the seismic mass and to the substrate in a deflectable manner; at least one bending beam engaged to the at least one suspension and to the substrate in a deflectable manner; and at least one piezoresistive and/or piezoelectric element configured to measure the angul…
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Electricity · mapped topic
- G01P15/0922Primary
Physics · mapped topic
Electricity · mapped topic
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- What does patent US8950258B2 cover?
- A micromechanical angular acceleration sensor for measuring an angular acceleration is disclosed. The sensor includes a substrate, a seismic mass, at least one suspension, which fixes the seismic mass to the substrate in a deflectable manner, and at least one piezoresistive and/or piezoelectric element for measuring the angular acceleration. The piezoresistive and/or piezoelectric element is ar…
- Who is the assignee on this patent?
- Neul Reinhard, Ohms Torsten, Hattass Mirko, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification G01P15/0922. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Feb 10 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).