Sensing circuit of a micro-electromechanical sensor
US-2024345125-A1 · Oct 17, 2024 · US
Microphone with backplate having specially shaped through-holes
US8948419B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8948419-B2 |
| Application number | US-93950410-A |
| Country | US |
| Kind code | B2 |
| Filing date | Nov 4, 2010 |
| Priority date | Jun 5, 2008 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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Abstract
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A MEMS microphone has 1) a backplate with a backplate interior surface and a plurality of through-holes, and 2) a diaphragm spaced from the backplate. The diaphragm is movably coupled with the backplate to form a variable capacitor. At least two of the through-holes have an inner dimensional shape (on the backplate interior surface) with a plurality of convex portions and a plurality of concave portions.
First claim
Opening claim text (preview).
What is claimed is: 1. A MEMS microphone comprising: a backplate having a backplate interior surface; a diaphragm having a plurality of through-holes, the diaphragm spaced from the backplate and facing the backplate interior surface, the diaphragm being movably coupled with the backplate to form a variable capacitor, the backplate having a plurality of through-holes, substantially all of the through-holes each having an inner dimensional shape on the backplate interior surface…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US8948419B2 cover?
- A MEMS microphone has 1) a backplate with a backplate interior surface and a plurality of through-holes, and 2) a diaphragm spaced from the backplate. The diaphragm is movably coupled with the backplate to form a variable capacitor. At least two of the through-holes have an inner dimensional shape (on the backplate interior surface) with a plurality of convex portions and a plurality of concave…
- Who is the assignee on this patent?
- Zhang Xin, Invensense Inc
- What technology area does this patent fall under?
- Primary CPC classification H04R19/04. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).