System and method for generating extreme ultraviolet light, and laser apparatus
US-2015351210-A1 · Dec 3, 2015 · US
US8947768B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8947768-B2 |
| Application number | US-201313893120-A |
| Country | US |
| Kind code | B2 |
| Filing date | May 13, 2013 |
| Priority date | May 14, 2012 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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The invention provides fiber-optic light sources such as cladding-pumped master oscillator—power amplifier (MOPA) systems which use double-clad optical fibers (DCF). The inner cladding of the first DCF used in the master oscillator section has a circular cross-section in order to enable the formation of low loss optical splices in the integrated MOPA structure. The inner cladding of the second DCF in the output amplifier section has a shaped non-circular cross-section in order to enhance the absorption of the pump light in the doped core of the second DCF.
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We claim: 1. An integrated master oscillator and power amplifier (MOPA) system comprising: a fiber laser oscillator for emitting laser light when pumped by pump light, comprising: a first double clad optical fiber (DCF) comprising: a core doped with active ions along at least a portion thereof, an inner cladding surrounding the core and defining a waveguide for the laser light generated in the core, and an outer cladding surrounding the inner cladding and defining a waveguide for the pump light; and, first and second fiber Bragg grating (FBG) reflectors integrally disposed at opposite ends of the first DCF so as to define an optical cavity of the fiber laser oscillator; a pump source optically coupled to the first DCF for emitting the pump light into the inner cladding of the first DCF; and, a first fiber optic power amplifier comprising a second DCF having a core doped with active ions for amplifying the laser light received from the fiber laser oscillator through the second FBG reflector, an inner cladding for guiding the laser radiation, and an outer cladding for guiding the pump radiation received from the fiber laser oscillator through the second FBG reflector; wherein: the first DCF of the fiber laser oscillator is optically coupled to the second DCF of the first fiber optic amplifier using one or more optical splices so as to form a monolithic fiber-optic structure, the inner cladding of the first DCF has a circular cross-section in order to enable the formation of low loss optical splices in the integrated MOPA structure; and, the inner cladding of the second double clad optical fiber has a shaped non-circular cross-section in order to enhance the absorption of the pump light in the doped core of the second DCF. 2. The MOPA system of claim 1 , wherein the fiber Bragg grating reflectors are formed in undoped portions of the first double clad optical fiber so as to permit the propagation of unabsorbed pump light to the first fiber optic power amplifier. 3. The MOPA system of claim 2 , wherein the second fiber Bragg grating reflector comprises a passive DCF, which is spliced between the first and second DCFs and has an inner cladding of circular cross-section that is matched in size to the inner cladding of the first DCF. 4. The MOPA of claim 1 , wherein the fiber laser oscillator and the first fiber optic power amplifier are sequentially coupled with fiber splices to each other and to the pump source so as to form an integrated all-fiber structure. 5. The MOPA of claim 1 , wherein the fiber laser oscillator and the first fiber optic power amplifier are sequentially coupled with fiber splices in the absence of a mode mixer therebetween. 6. The MOPA of claim 1 , including one or more intermediate fiber-optic amplifiers splice-coupled between the fiber laser oscillator and the first fiber optic power amplifier, each comprising a double clad optical fiber amplifying medium having an inner cladding of a circular cross-section to enable low-loss fiber-optic splices. 7. An integrated all-fiber master oscillator power amplifier (MOPA) system comprising: a fiber laser oscillator comprising two fiber Bragg grating (FBG) reflectors spliced at opposite ends of a section of an amplifying optical fiber, an output power amplifier, and one or more intermediate fiber amplifiers sequentially coupled in-between the fiber laser oscillator and the output power amplifier using fiber-optic splices in the absence of mode mixers therebetween to form an integral fiber-optic structure; wherein each section of the MOPA system, including the fiber laser oscillator, the output amplifier and the one or more intermediate fiber amplifiers, is formed of a double-clad optical fiber (DCF) having a core, an inner cladding, and an outer cladding; and, wherein the inner cladding of the DCF has a circular cross-section in all sections of the MOPA system except for the output power amplifier where the inner cladding of the DCF has a shaped non-circular cross-section, in order to enhance the absorption of the pump light in a doped core of the output power amplifier while enabling the formation of low loss optical splices in the rest of the MOPA system.
Amplifier arrangements, e.g. MOPA · CPC title
Fibre amplifiers (H01S3/06708 takes precedence) · CPC title
Cladding pumping, i.e. pump light propagating in a clad surrounding the active core · CPC title
Fibre having more than one cladding · CPC title
Tandem amplifiers · CPC title
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