Substrate processing apparatus
US-2024142886-A1 · May 2, 2024 · US
Positioning device, lithographic apparatus, positioning method and device manufacturing method
US8947640B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8947640-B2 |
| Application number | US-201213494703-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 12, 2012 |
| Priority date | Jun 22, 2011 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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- Title
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Abstract
Official abstract text for this publication.
A positioning device for positioning an object within a lithographic apparatus, including a support structure for supporting the object, at least two short-stroke units, each connected to the support structure, and a long-stroke unit. In the arrangement, each of the short-stroke units includes a short-stroke actuator system configured to provide independently at least one actuation force between the short-stroke unit and the long-stroke unit, and the long-stroke unit includes a long-stroke actuator system configured to provide at least one actuation force between the long-stroke unit and a reference structure of the lithographic apparatus.
First claim
Opening claim text (preview).
The invention claimed is: 1. A positioning device for positioning an object within a lithographic apparatus, the positioning device comprising: a support structure configured to support the object; at least two short-stroke units, each having a connection section connected to the support structure at a respective connection point; and a long-stroke unit; wherein each of the short-stroke units comprises a short-stroke actuator system configured to cooperate with a same surfac…
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Electricity · mapped topic
Physics · mapped topic
- G03F7/70758Primary
Physics · mapped topic
Electricity · mapped topic
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- What does patent US8947640B2 cover?
- A positioning device for positioning an object within a lithographic apparatus, including a support structure for supporting the object, at least two short-stroke units, each connected to the support structure, and a long-stroke unit. In the arrangement, each of the short-stroke units includes a short-stroke actuator system configured to provide independently at least one actuation force betwee…
- Who is the assignee on this patent?
- Lafarre Raymond Wilhelmus Louis, Cox Henrikus Herman Marie, De Groot Antonius Franciscus Johannes, and 2 more
- What technology area does this patent fall under?
- Primary CPC classification G03F7/70758. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).