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Illumination optical system, exposure apparatus, and device manufacturing method
US8947635B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8947635-B2 |
| Application number | US-201113168068-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jun 24, 2011 |
| Priority date | Dec 24, 2008 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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Abstract
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According to one embodiment, an illumination optical system is provided with an optical integrator which forms a predetermined light intensity distribution on an illumination pupil plane in an illumination optical path of the illumination optical system with incidence of exposure light from a light source device thereinto; a transmission filter arranged on the reticle side with respect to the optical integrator and in a first adjustment region set including the illumination pupil plane in an optical-axis direction of the illumination optical system, and having a transmittance characteristic varying according to positions of the exposure light incident thereinto; and a movement mechanism which moves the transmission filter along the optical-axis direction in the first adjustment region.
First claim
Opening claim text (preview).
The invention claimed is: 1. An illumination optical system for illuminating an illumination target surface with light from a light source, comprising: an optical integrator which distributes the light from the light source on an illumination pupil plane in an illumination optical path of the illumination optical system; a transmission section which is arranged on the illumination pupil plane, the transmission section having a transmittance characteristic varying according to po…
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Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
Physics · mapped topic
- G02B27/0966Primary
Physics · mapped topic
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- What does patent US8947635B2 cover?
- According to one embodiment, an illumination optical system is provided with an optical integrator which forms a predetermined light intensity distribution on an illumination pupil plane in an illumination optical path of the illumination optical system with incidence of exposure light from a light source device thereinto; a transmission filter arranged on the reticle side with respect to the o…
- Who is the assignee on this patent?
- Tanaka Hirohisa, Mizuno Yasushi, Nikon Corp
- What technology area does this patent fall under?
- Primary CPC classification G02B27/0966. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).