Projection exposure apparatus including mechanism to reduce influence of pressure fluctuations
US-2015316854-A1 · Nov 5, 2015 · US
Apparatus for supporting an optical element, and method of making same
US8947634B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8947634-B2 |
| Application number | US-93350609-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 15, 2009 |
| Priority date | Apr 15, 2008 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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- Title
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Abstract
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An apparatus for supporting an optical element is provided. The apparatus includes a lens cell ( 1003 ) and a plurality of fingers ( 1000 ) coupled to the lens cell. Each finger includes a base ( 1012 ) configured to be coupled to the optical element when mounted therein, first ( 1006 a ) and second ( 1006 b ) flexures coupled at first respective ends to and extending from the base ( 1012 ) at a divergence angle between about 75 and 165 degrees, and a mounting member ( 1008 ) configured to couple together second respective ends of the first and second flexures. The mounting member thereby couples the base ( 1012 ) to the lens cell ( 1003 ).
First claim
Opening claim text (preview).
What is claimed is: 1. An apparatus for supporting an optical element, comprising: a lens cell having an interior surface, wherein the interior surface circumscribes an interior region of the lens cell; and a plurality of fingers attached to the lens cell, wherein each of the plurality of fingers includes: a base configured to directly contact the optical element. first and second flexures coupled at first respective ends to the base and extending from the base at a divergenc…
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- G03F7/70825Primary
Physics · mapped topic
Cross-Sectional Technologies · mapped topic
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- What does patent US8947634B2 cover?
- An apparatus for supporting an optical element is provided. The apparatus includes a lens cell ( 1003 ) and a plurality of fingers ( 1000 ) coupled to the lens cell. Each finger includes a base ( 1012 ) configured to be coupled to the optical element when mounted therein, first ( 1006 a ) and second ( 1006 b ) flexures coupled at first respective ends to and extending from the base ( 1012 )…
- Who is the assignee on this patent?
- Farnsworth Windy Lynn, Simani Sohrab, Asml Holding Nv
- What technology area does this patent fall under?
- Primary CPC classification G03F7/70825. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).