Group III-nitrides on Si substrates using a nanostructured interlayer

US8946674B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8946674-B2
Application numberUS-51261506-A
CountryUS
Kind codeB2
Filing dateAug 29, 2006
Priority dateAug 31, 2005
Publication dateFeb 3, 2015
Grant dateFeb 3, 2015

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Abstract

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A layered group III-nitride article includes a single crystal silicon substrate, and a highly textured group III-nitride layer, such as GaN, disposed on the silicon substrate. The highly textured group III-nitride layer is crack free and has a thickness of at least 10 μm. A method for forming highly textured group III-nitride layers includes the steps of providing a single crystal silicon comprising substrate, depositing a nanostructured In x Ga 1-x N (1≧x≧0) interlayer on the silicon substrate, and depositing a highly textured group III-nitride layer on the interlayer. The interlayer has a nano indentation hardness that is less than both the silicon substrate and the highly textured group III-nitride layer.

First claim

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What is claimed is: 1. A layered group III-nitride article, comprising: a single crystal silicon comprising substrate; a nanostructured interlayer; said nanostructured interlayer comprising a nanostructured feature selected from the group consisting of a columnar film, a plurality of nanorods, a plurality of microrods, and a combination thereof; and a highly textured crystal group III-nitride layer, said highly textured group III-nitride layer being crack free and having a thic…

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What does patent US8946674B2 cover?
A layered group III-nitride article includes a single crystal silicon substrate, and a highly textured group III-nitride layer, such as GaN, disposed on the silicon substrate. The highly textured group III-nitride layer is crack free and has a thickness of at least 10 μm. A method for forming highly textured group III-nitride layers includes the steps of providing a single crystal silicon compr…
Who is the assignee on this patent?
Kryliouk Olga, Park Hyun Jong, Anderson Timothy J, and 1 more
What technology area does this patent fall under?
Primary CPC classification H10P14/36. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).