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Method and installation for producing a semiconductor device, and semiconductor device
US8946059B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8946059-B2 |
| Application number | US-60335209-A |
| Country | US |
| Kind code | B2 |
| Filing date | Oct 21, 2009 |
| Priority date | Oct 15, 2009 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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Abstract
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A method of producing a semiconductor device is provided, the semiconductor device including a substrate, a semiconductor layer and at least one metallization layer adjacent to at least one element chosen from the substrate and the semiconductor layer, the method including forming at least one metallization layer which, adjacent to at least one element chosen from the substrate and the semiconductor layer, includes oxygen.
First claim
Opening claim text (preview).
The invention claimed is: 1. A method of producing a semiconductor device comprising a substrate, a semiconductor layer, and at least one metallization layer adjacent to at least one element chosen from the substrate and the semiconductor layer, the method comprising: positioning a substrate into a processing chamber having a sputtering target; forming the at least one metallization layer including an oxygen concentration gradient on the substrate by: forming a barrier/adhesion…
Assignees
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Classifications
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
- H10D30/6737Primary
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8946059B2 cover?
- A method of producing a semiconductor device is provided, the semiconductor device including a substrate, a semiconductor layer and at least one metallization layer adjacent to at least one element chosen from the substrate and the semiconductor layer, the method including forming at least one metallization layer which, adjacent to at least one element chosen from the substrate and the semicond…
- Who is the assignee on this patent?
- Scheer Evelyn, Pieralisi Fabio, Bender Marcus, and 1 more
- What technology area does this patent fall under?
- Primary CPC classification H10D30/6737. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).