Gate isolation features and methods of fabricating the same in semiconductor devices
US-2024379673-A1 · Nov 14, 2024 · US
Replacement gate structures and methods of manufacturing
US8946049B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8946049-B2 |
| Application number | US-201213444447-A |
| Country | US |
| Kind code | B2 |
| Filing date | Apr 11, 2012 |
| Priority date | Apr 11, 2012 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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Abstract
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Gate structures and methods of manufacturing is disclosed. The method includes forming a continuous replacement gate structure within a trench formed in dielectric material. The method further includes segmenting the continuous replacement gate structure into separate replacement gate structures. The method further includes forming insulator material between the separate replacement gate structures.
First claim
Opening claim text (preview).
What is claimed: 1. A method, comprising: forming a continuous replacement gate structure within a trench formed in dielectric material; segmenting the continuous replacement gate structure into separate replacement gate structures; and forming insulator material between the separate replacement gate structures, wherein the forming the continuous replacement gate structure comprises: forming a continuous dummy gate structure; forming the dielectric material about the cont…
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Classifications
Electricity · mapped topic
- H10D84/83Primary
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US8946049B2 cover?
- Gate structures and methods of manufacturing is disclosed. The method includes forming a continuous replacement gate structure within a trench formed in dielectric material. The method further includes segmenting the continuous replacement gate structure into separate replacement gate structures. The method further includes forming insulator material between the separate replacement gate struct…
- Who is the assignee on this patent?
- Anderson Brent A, Nowak Edward J, IBM
- What technology area does this patent fall under?
- Primary CPC classification H10D84/83. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).