Merged fin finFET with (100) sidewall surfaces and method of making same

US8946033B2 · US · B2

Patent metadata
FieldValue
Publication numberUS-8946033-B2
Application numberUS-201213561352-A
CountryUS
Kind codeB2
Filing dateJul 30, 2012
Priority dateJul 30, 2012
Publication dateFeb 3, 2015
Grant dateFeb 3, 2015

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Abstract

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A merged fin finFET and method of fabrication. The finFET includes: two or more single-crystal semiconductor fins on a top surface of an insulating layer on semiconductor substrate, each fin of the two or more fins having a central region between and abutting first and second end regions and opposite sides, top surfaces and sidewalls of the two or more fins are ( 100 ) surfaces and the longitudinal axes of the two or more fins aligned with a [ 100 ] direction; a gate dielectric layer on each fin of the two or more fins; an electrically conductive gate over the gate dielectric layer over the central region of each fin of the of two or more fins; and a merged source/drain comprising an a continuous layer of epitaxial semiconductor material on ends of each fin of the two or more fins, the ends on a same side of the conductive gate.

First claim

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What is claimed is: 1. A method, comprising: (a) forming two or more fins on a top surface of an insulating layer on semiconductor substrate, each fin of said two or more fins being a solid rectangular block of single-crystal semiconductor material, each fin of said two or more fins having a central region between and abutting first and second end regions and opposite sides, top surfaces and sidewalls of said two or more fins are (100) surfaces and the longitudinal axes of said tw…

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What does patent US8946033B2 cover?
A merged fin finFET and method of fabrication. The finFET includes: two or more single-crystal semiconductor fins on a top surface of an insulating layer on semiconductor substrate, each fin of the two or more fins having a central region between and abutting first and second end regions and opposite sides, top surfaces and sidewalls of the two or more fins are ( 100 ) surfaces and the longitud…
Who is the assignee on this patent?
Adam Thomas N, Fogel Keith E, Li Jinghong, and 2 more
What technology area does this patent fall under?
Primary CPC classification H10D30/62. Mapped technology areas include Electricity.
When was this patent published?
Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
What related patents are in patentsdb?
We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).