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Method of making a TFT charge storage memory cell having high-mobility corrugated channel
US8946017B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8946017-B2 |
| Application number | US-201213351456-A |
| Country | US |
| Kind code | B2 |
| Filing date | Jan 17, 2012 |
| Priority date | Jun 1, 2005 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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Abstract
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Numerous other aspects are provided a method for making a nonvolatile memory cell. The method includes forming a non-planar dielectric structure, and conformally depositing a semiconductor layer over the dielectric structure. A portion of the semiconductor layer serves as a channel region for a transistor, and the channel region is non-planar in shape.
First claim
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The invention claimed is: 1. A method for forming a monolithic three dimensional memory array, the method comprising: forming a first plurality of substantially parallel, substantially coplanar rail-shaped dielectric features extending in a first direction; conformally depositing a first semiconductor layer over the first rail-shaped dielectric features, wherein the deposited first semiconductor layer has a corrugated shape; conformally forming a first charge storage stack ove…
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Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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Frequently asked questions
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- What does patent US8946017B2 cover?
- Numerous other aspects are provided a method for making a nonvolatile memory cell. The method includes forming a non-planar dielectric structure, and conformally depositing a semiconductor layer over the dielectric structure. A portion of the semiconductor layer serves as a channel region for a transistor, and the channel region is non-planar in shape.
- Who is the assignee on this patent?
- Scheuerlein Roy E, Sandisk 3D Llc
- What technology area does this patent fall under?
- Primary CPC classification H10D30/6893. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).