Multicathode deposition system and methods
US-12051576-B2 · Jul 30, 2024 · US
Method of manufacturing organic light-emitting display device using an organic layer deposition apparatus
US8945974B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8945974-B2 |
| Application number | US-201213725610-A |
| Country | US |
| Kind code | B2 |
| Filing date | Dec 21, 2012 |
| Priority date | Sep 20, 2012 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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Abstract
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A method of manufacturing an organic light-emitting display device includes: fixing a substrate onto an electrostatic chuck; combining the electrostatic chuck with a chuck moving member; moving the electrostatic chuck along a guide member into a chamber by using the chuck moving member; and depositing an organic layer on the substrate while moving the substrate with respect to an organic layer deposition assembly arranged in the chamber, the chuck moving member being moved along the guide member by an association of a chain unit and a hook unit, and the substrate being spaced apart from the organic layer deposition assembly.
First claim
Opening claim text (preview).
What is claimed is: 1. A method of manufacturing an organic light-emitting display device, the method comprising: fixing a substrate onto an electrostatic chuck; combining the electrostatic chuck with a chuck moving member; moving the electrostatic chuck along a guide member into a chamber by using the chuck moving member; and depositing an organic layer on the substrate while moving the substrate with respect to an organic layer deposition assembly arranged in the chamber,…
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Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Chemistry & Metallurgy · mapped topic
Electricity · mapped topic
Electricity · mapped topic
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- What does patent US8945974B2 cover?
- A method of manufacturing an organic light-emitting display device includes: fixing a substrate onto an electrostatic chuck; combining the electrostatic chuck with a chuck moving member; moving the electrostatic chuck along a guide member into a chamber by using the chuck moving member; and depositing an organic layer on the substrate while moving the substrate with respect to an organic layer …
- Who is the assignee on this patent?
- Samsung Display Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification C23C14/042. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).