Method of manufacturing liquid ejection head

Patent metadata

Field	Value
Publication number	US-8945818-B2
Application number	US-201414266483-A
Country	US
Kind code	B2
Filing date	Apr 30, 2014
Priority date	May 2, 2013
Publication date	Feb 3, 2015
Grant date	Feb 3, 2015

Abstract

A method of manufacturing a liquid ejection head, and the method includes a process of providing a first photosensitive resin layer containing a photodegradable positive photosensitive resin and serving as a mold material of the channel on a substrate, a process of providing a gas barrier layer having a film density of 1 g/cm 3 or more on the first photosensitive resin layer, a process of subjecting the first photosensitive resin layer and the gas barrier layer to pattern exposure, and then performing development to thereby form the mold material of a channel and also removing the gas barrier layer before or simultaneously with the development, a process of providing a second photosensitive resin layer on the mold material and the substrate, a process of subjecting the second photosensitive resin layer to pattern exposure, and then performing development, and a process of removing the mold material of the channel.

First claim

What is claimed is:

1. A method of manufacturing a liquid ejection head having a substrate and an ejection port formation member in which a liquid channel is formed between the member and the substrate and ejection ports which communicate with the channel and eject liquid are provided, the method comprising:
providing a first photosensitive resin layer containing a photodegradable positive photosensitive resin and serving as a mold material of the channel on the substrate;
provi…

Assignees

• Canon Kk

Inventors

• Ishizuka Kazunari

Classifications

• B41J2/1631

  Operations & Transport · mapped topic

• B41J2/1635

  Operations & Transport · mapped topic

• G03F7/038

  Physics · mapped topic

• G03F7/039

  Physics · mapped topic

• G03F7/0752

  Physics · mapped topic