Reduced capacity carrier, transport, load port, buffer system
US-9224628-B2 · Dec 29, 2015 · US
Deposition apparatus, method for manufacturing organic light emitting display apparatus, and organic light emitting display apparatus
US8945682B2 · US · B2
| Field | Value |
|---|---|
| Publication number | US-8945682-B2 |
| Application number | US-201314040334-A |
| Country | US |
| Kind code | B2 |
| Filing date | Sep 27, 2013 |
| Priority date | May 16, 2013 |
| Publication date | Feb 3, 2015 |
| Grant date | Feb 3, 2015 |
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Abstract
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A deposition apparatus includes a first transporting unit configured to transport moving units, to which substrates may be detachably affixed, in a first direction; and a second transporting unit configured to transport empty moving units, from which the respective substrates have been detached, in a return direction opposite to the first direction, wherein the moving units are transported cyclically in reusing fashion.
First claim
Opening claim text (preview).
What is claimed is: 1. A method of manufacturing organic light emitting display apparatus, the method comprising: transporting a moving unit, to which a substrate is detachably affixed, into a chamber by using a first transporting unit; forming a layer by discharging a deposition material onto the substrate from a deposition assembly disposed inside the chamber, the forming being performed while the substrate is spaced apart by a predetermined distance from the deposition assemb…
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Classifications
Operations & Transport · mapped topic
Operations & Transport · mapped topic
- H10P72/3222Primary
Electricity · mapped topic
Electricity · mapped topic
- B05B13/0221Primary
Operations & Transport · mapped topic
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- What does patent US8945682B2 cover?
- A deposition apparatus includes a first transporting unit configured to transport moving units, to which substrates may be detachably affixed, in a first direction; and a second transporting unit configured to transport empty moving units, from which the respective substrates have been detached, in a return direction opposite to the first direction, wherein the moving units are transported cycl…
- Who is the assignee on this patent?
- Samsung Display Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/3222. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Tue Feb 03 2015 00:00:00 GMT+0000 (Coordinated Universal Time) (B2). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).